STMicroelectronics Bridges the Gap Between Bulk and Surface Micromachining for Critical Sensors
(Thomson Reuters ONE) -
* THELMA60 manufacturing process enters full production
* Delivers sensitivity of Bulk micromachining for near-Surface micromachining
cost
Geneva, November 5, 2014 - STMicroelectronics (NYSE: STM), a global
semiconductor leader serving customers across the spectrum of electronics
applications, the world's top MEMS (Micro-Electro-Mechanical Systems)
manufacturer and the leading supplier of MEMS for consumer and mobile[1] as well
as automotive applications[2], today announced that it had started production of
MEMS sensors using its newly qualified, proprietary THELMA60 (60µm Thick Epi-
poly Layer for Micro-gyroscopes and Accelerometers) surface-micromachining
fabrication process.
Semiconductor manufacturers have relied in the past on two manufacturing
processes for the accurate high-volume production of three-dimensional MEMS
devices, including accelerometers, gyroscopes, microphones, and pressure
sensors. Surface micromachining has been viewed as more cost-effective whereas
bulk micromachining was often chosen for higher sensitivity and precision. The
ST innovation combines the advantages of both approaches, opening up the
possibility to drive surface-micromachined MEMS into new markets and
applications.
"Several companies have tried and failed to bring the precision and sensitivity
of bulk micromachining to meet the higher-volume efficiencies of the growing
IoT, Consumer, and Mobile markets," said Jean-Christophe Eloy, President & CEO,
Yole Développement. "ST has executed an innovative and effective end-run on the
problem with its new 60µm epitaxial layer surface-micromachining process."
"The introduction of ST's THELMA60 surface-micromachining process starts a new
era for inertial sensors. As already proven by a number of design wins that are
now entering production, THELMA60 is the ideal solution to increase cost
efficiency for challenging applications that demand high sensitivity like
implantable medical devices and high-end sensors for aerospace systems and
seismic exploration - once the exclusive domain of bulk micromachining," said
Benedetto Vigna, Executive Vice President and General Manager Analog, MEMS and
Sensors Group, STMicroelectronics. "After we have revolutionized the market for
consumer inertial sensors, we are now set to change the game for high-end sensor
applications. This is just the start."
Technical notes to Editors:
Surface micromachining forms structures in a "thick" crystalline layer
(epitaxial or epi-) grown on top of a silicon wafer. Processing of this layer-
typically up to 25 micrometers thick, or about the diameter of a white blood
cell-including deposition of new material and cutting and photolithographic
masking, creates the mass of the moving structure in the MEMS device; the size
of this mass is linked to the product's sensitivity. Surface micromachining is
extremely efficient and cost-effective, lending itself to consumer, mobile, and
Internet of Things (IoT) applications.
In contrast, Bulk micromachining builds the microstructures directly into the
silicon substrate and therefore the mass of the moving structure-and its
sensitivity and precision-is higher. Naturally, this increased sensitivity comes
at greater expense, aiming its usefulness to medical, aerospace, automotive, and
other higher-end industrial applications.
Now, ST has increased the epitaxial layer to 60 microns with the benefit of
increased sensitivity in the range traditionally occupied by bulk MEMS.
About STMicroelectronics
ST is a global leader in the semiconductor market serving customers across the
spectrum of sense and power and automotive products and embedded processing
solutions. From energy management and savings to trust and data security, from
healthcare and wellness to smart consumer devices, in the home, car and office,
at work and at play, ST is found everywhere microelectronics make a positive and
innovative contribution to people's life. By getting more from technology to get
more from life, ST stands for life.augmented.
In 2013, the Company's net revenues were $8.08 billion. Further information on
ST can be found at www.st.com.
For Press Information Contact:
STMicroelectronics
Michael Markowitz
Director Technical Media Relations
+1 781 591 0354
michael.markowitz(at)st.com
--------------------------------------------------------------------------------
[1] Source: IHS Consumer and Mobile MEMS Market Tracker H1 2014
[2] Source: IHS Market Tracker Automotive MEMS H1 2014
New MEMS Processing Techno from STMicro:
http://hugin.info/152740/R/1868871/656921.pdf
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Source: STMicroelectronics via GlobeNewswire
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Datum: 05.11.2014 - 15:00 Uhr
Sprache: Deutsch
News-ID 349959
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contact information:
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