SENTECH at SEMICON CHINA 2015
During SEMICON China 2015, the Chinese SENTECH user community and guests met at the representative SENTECH stand and at the SENTECH Plasma Seminar. The introduction of new SENTECH plasma etch and deposition products to the Chinese market and networking were the highlights of the seminar.
(firmenpresse) - The new SIPAR System combining PECVD and ALD in one reactor was introduced as latest development of the plasma product portfolio for R&D. The SIPAR System enables automatic depositing multilayer stacks composed of plasma enhanced chemical vapour deposition (PECVD) and atomic layer deposition (ALD) layers. PECVD layers feature high deposition rates and ALD layers provide high conformity and homogeneity. SIPAR is designed for low damage deposition of multilayers at low temperature <100°C using the SENTECH proprietary PTSA inductively coupled plasma source.
The SENDURO® MEMS is SENTECHs answer to the variety of measurement tasks in MEMS and Sensor production ranging from membranes, air gaps, dielectrics, semiconductors and metals to complex layer stacks. The SENDURO® MEMS provides a cost-effective metrology solution for MEMS, sensors, OLED, and LED application.
The SIPAR and SENDURO® MEMS were well received at the seminar and contributed to the success of the SEMICON China. For more information on the SIPAR and SENDURO® MEMS, please contact us.
Themen in dieser Pressemitteilung:
ellipsometry
semiconductors
semicon-china
sentech
sentech-pecvd
pecvd
mems
uelasma-etching
plasma-deposition
Unternehmensinformation / Kurzprofil:
SENTECH offers leading edge plasma process technology equipment for etching and deposition and thin film measurement instrumentation based on ellipsometry. The advanced SENTECH plasma equipment is based on the inductively coupled plasma source PTSA (planar triple spiral antenna) which was developed by SENTECH for low damage and high rate etching and deposition. .
Datum: 31.03.2015 - 10:08 Uhr
Sprache: Deutsch
News-ID 382215
Anzahl Zeichen: 1389
contact information:
Contact person: Pia Romanowski
Town:
Berlin
Phone: +49 30 63 92 55 20
Kategorie:
Semiconductors
Typ of Press Release: Messeinformation
type of sending: Veröffentlichung
Date of sending: 31.03.2015
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"SENTECH at SEMICON CHINA 2015"
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