Applied Materials Reveals Breakthrough RTP Technology for the 20nm Era
(Thomson Reuters ONE) -
* Revolutionary design positions Applied at the forefront of RTP for multiple
generations
* Only RTP system to overcome yield-limiting hot spots in the chip, enabling
the production of more high-performance devices per wafer
* Live webcast today at 10 a.m. PDT at www.becauseinnovationmatters.com
SANTA CLARA, Calif., June 29, 2011 - Applied Materials, Inc. today advanced the
state of the art in nanoscale transistor fabrication with the launch of its
Applied Vantage(®) Vulcan(TM) rapid thermal processing (RTP) system. The system
leapfrogs current RTP technology to bring a new level of precision and control
to the anneal process, enabling chipmakers to reduce variability and boost
production yields of their most highly-valued, highest-performing devices.
For manufacturers to achieve the highest chip yields, transistors with the same
design should perform identically in all areas of the wafer. This is becoming a
major challenge at the 20nm era (28nm and below) since transistors are smaller
and more sensitive to temperature variations while many logic chips are also
larger in size, making uniformity across the die increasingly difficult. Direct
radiant heating can cause variations in temperature, or "hot spots," on a
patterned wafer - leading to significant variations in the electrical
performance of the transistors - and resulting in many low-end chips on the
wafer.
Applied's Vantage Vulcan system overcomes these yield-limiting temperature
variations by applying heat to the unpatterned backside of the wafer to deliver
an unprecedented level of temperature uniformity. Using the company's proven
honeycomb lamp array, the system can control within-die temperature to less than
3°C - even while the wafer temperature is aggressively ramping at more than
200°C per second.
"The Vantage Vulcan system represents a significant technology extension for the
industry's roadmap and sets a new benchmark in eliminating sources of
temperature variability," said Sundar Ramamurthy, vice president and general
manager of Applied Materials' Front End Products business unit. "We've listened
to the needs of our customers and developed a solution that addresses one of
their most daunting challenges. Leading chip manufacturers are already
recognizing the device benefits of our new Vantage Vulcan system."
In addition to being the first RTP system to heat the wafer entirely from the
backside, the Vantage Vulcan system's unique closed-loop control can dynamically
control wafer temperature as it ramps from almost room temperature to 1,300°C.
This breakthrough capability enables any device wafer, including wafers with
challenging reflective surfaces, to be processed without recipe modification - a
critical benefit for the high-mix, fast-changing environment of foundries -
while also simplifying the integration of new materials and new transistor
architectures.
Applied's expertise in temperature control has made the company both a pioneer
and market leader in RTP technology. Applied has more than 1,000 RTP systems
installed at customers worldwide, making Applied's RTP technology the industry's
choice for manufacturing nearly every advanced microchip in the last decade.
Applied Materials will host a live webcast today at 10:00 a.m. PDT to discuss
this breakthrough technology. To hear the webcast and access video, photographs
and other materials concerning this product, visit
www.becauseinnovationmatters.com.
Applied Materials, Inc. (Nasdaq:AMAT) is the global leader in providing
innovative equipment, services and software to enable the manufacture of
advanced semiconductor, flat panel display and solar photovoltaic products. Our
technologies help make innovations like smartphones, flat screen TVs and solar
panels more affordable and accessible to consumers and businesses around the
world. At Applied Materials, we turn today's innovations into the industries of
tomorrow. Learn more at www.appliedmaterials.com.
# # #
Contact:
Connie Duncan (editorial/media) 408.563.6209
Michael Sullivan (financial community) 408.986.7977
The breakthrough Applied Vantage Vulcan RTP system:
http://hugin.info/143724/R/1526776/462440.jpg
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Source: Applied Materials via Thomson Reuters ONE
[HUG#1526776]
Unternehmensinformation / Kurzprofil:
Datum: 29.06.2011 - 13:30 Uhr
Sprache: Deutsch
News-ID 55970
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contact information:
Town:
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Kategorie:
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