FRT presents third-generation ultra-stable platform for MicroProf® series metrology instruments
At the Control, the international trade fair for quality assurance, from 7 to 10 May in Stuttgart, FRT GmbH presents the stand-alone metrology device MicroProf® 200
(PresseBox) - With the third generation of the MicroProf® tool series, FRT offers an ultra-stable platform: the completely in-house control and analysis software and more than 20 years of expertise in surface metrology form the basis. FRT's multi-sensor concept, combined with hybrid measurement technology, supports production lines all over the world.
The MicroProf® enables a wide range of measurement tasks to be performed quickly, efficiently and intuitively. As an established standard measuring instrument in modern 3D surface metrology, our customers have been using MicroProf® for many years in the semiconductor, medical and automotive industries. But they are also used in the MEMS/NANO/MST, sapphire, photovoltaics, mechanical engineering, optics and packaging technology industries. The devices are very versatile.
Whether you want to measure the topography, the total thickness or the layer thickness of your samples without contact, the versatile MicroProf® can be used universally due to the proven optical multi-sensor technology. Various optical measuring methods have been combined to form one universal tool. Depending on your requirements, the MicroProf® enables you to perform a quick overview measurement of the entire sample as well as high-resolution detailed measurements down to the sub-nanometer range. The open combinability of the sensors creates special flexibility. If required, sensors can be retrofitted quickly and easily.
FRT GmbH - the art of metrology
FRT is one of the world's leading suppliers of 3D metrology for R&D and high-volume manufacturing. The FRT MicroProf® is well established in semiconductor front end, advanced packaging, MEMS, VCSEL, automotive, engineering and optics.
A third generation ultra stable platform and complete in-house software are the result of more than 20 years of experience. The FRT multi-sensor concept and hybrid metrology options are empowering production lines around the world.The applications are topography, step height, roughness, TTV, bow, warp, stress, TSV, layer and stack thickness, overlay and CD - and many other parameters, contact-free and fully automated. Various measuring methods can be combined with point, line and field of view sensors and as well as film thickness sensors and atomic force microscope in one metrology tool and within one recipe.
Unternehmensinformation / Kurzprofil:
FRT GmbH - the art of metrologyFRT is one of the world's leading suppliers of 3D metrology for R&D and high-volume manufacturing. The FRT MicroProf® is well established in semiconductor front end, advanced packaging, MEMS, VCSEL, automotive, engineering and optics.A third generation ultra stable platform and complete in-house software are the result of more than 20 years of experience. The FRT multi-sensor concept and hybrid metrology options are empowering production lines around the world.The applications are topography, step height, roughness, TTV, bow, warp, stress, TSV, layer and stack thickness, overlay and CD - and many other parameters, contact-free and fully automated. Various measuring methods can be combined with point, line and field of view sensors and as well as film thickness sensors and atomic force microscope in one metrology tool and within one recipe.
Datum: 11.03.2019 - 16:11 Uhr
Sprache: Deutsch
News-ID 589414
Anzahl Zeichen: 2597
contact information:
Town:
Bergisch Gladbach
Kategorie:
Consulting
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