FRT GmbH launches the MicroProf® DI ? inspection and metrology in one flexible platform!
Fully automated wafer inspection for semiconductor and MEMS industries
(PresseBox) - FRT GmbH introduced the MicroProf® DI to the market in March. At the production site in Bergisch Gladbach, the tool is developed to solve high-precision optical surface metrology and inspection tasks for semiconductor applications. With the MicroProf® DI, FRT GmbH offers a defect inspection tool with singleshot module, step camera and high-precision microscope station, as well as comprehensive multi-sensor metrology with different topography and layer thickness sensors. The determination of defects down to sub-?m range can be performed fast and reliable.
The optical inspection tool MicroProf® DI enables to inspect structured and unstructured wafers during the entire manufacturing process. By combining 2D inspection and metrology, the MicroProf® DI provides measurement solutions for a variety of applications, including defect inspection and wafer-level metrology.
MicroProf® DI provides the following advantages:
reliable platform, including highly flexible software
development and qualification of new customer processes
modules that can be flexibly combined on the same tool platform
covering all wafer surfaces at high throughput for efficient process control
The tool provides high throughput and perfectly fits in any HVM wafer fab. The core component is the worldwide established multi-sensor tool MicroProf® 300. It allows both the measurement of wafers at different process steps and ? by using hybrid metrology to enhance the precision of measurements on samples where a single sensor or measuring principle is just not enough.
Our defect inspection software provides effective visualization, versatile processing and fast generation of wafer maps as well as precise quantification and comprehensible documentation of defects.
The unique MicroProf® DI combines metrology and inspection in one flexible tool.
Contact us if you have any questions or visit our website.
+49 2204 84 3205
info(at)frt-gmbh.com
https://frtmetrology.com/
FRT is one of the world?s leading suppliers of 3D metrology and inspection for R&D and high-volume manufacturing. The FRT MicroProf® is well established in semiconductor front end, advanced packaging, MEMS, VCSEL, automotive, engineering and optics.
A third generation ultra stable platform and complete in-house software are the result of more than 20 years of experience. The FRT multi-sensor concept and hybrid metrology options are empowering production lines around the world.
The applications are topography, step height, roughness, TTV, bow, warp, stress, TSV, layer and stack thickness, overlay and CD ? and many other parameters, contact-free and fully automated.
Unternehmensinformation / Kurzprofil:
FRT is one of the world?s leading suppliers of 3D metrology and inspection for R&D and high-volume manufacturing. The FRT MicroProf® is well established in semiconductor front end, advanced packaging, MEMS, VCSEL, automotive, engineering and optics.A third generation ultra stable platform and complete in-house software are the result of more than 20 years of experience. The FRT multi-sensor concept and hybrid metrology options are empowering production lines around the world.The applications are topography, step height, roughness, TTV, bow, warp, stress, TSV, layer and stack thickness, overlay and CD? and many other parameters, contact-free and fully automated.
Datum: 06.04.2020 - 14:02 Uhr
Sprache: Deutsch
News-ID 610167
Anzahl Zeichen: 3021
contact information:
Town:
Bergisch Gladbach
Kategorie:
Consulting
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